MEMSCAP - The Power of a Small World

Many quality publications, articles and books have been written about MEMS. We offer here a subjective selection of some of them, for those who wish to discover or perfect their knowledge of MEMS.

Introductory Articles

Joe McEntee. Start Making Microsensors, Physics World, December 1993, pp 33-37.

J Bryzek, K Petersen, W McCulley. Micromachines on the March, IEEE Spectrum, 31 (5), May 1994, pp 20-31.

A Heuberger. Silicon Microsystems, Microelectronic Engineering, 21, 1993, pp 445-458.

Introductory Technical Articles

IEE Colloquium on: Microengineering - the Future, held at the IEE, Savoy Place, London, 13 October 1993. Digest No: 1993/182.

IEE Colloquium on: Microengineering in Instrumentation, held at the IEE, Savoy Place, London, 16 November 1993. Digest No: 1993/218.

IEE Colloquium on: Medical Applications of Microengineering, held at the IEE, Savoy Place, London, 31 January 1996. Ref: 96/019

Technical Articles

B. Fernandez, Joel A. Kubby. Large-stroke actuators have applications in adaptive optics and vision science, SPIE Newsroom, 2007

DV Morgan, K Board. An Introduction to Semiconductor Microtechnology, John Wiley & Sons, 1985.

Notes from a two day short course on: Micromachining of Materials, held at the University of Southampton, 25 & 26 March 1992. University of Southampton Institute of Transducer Technology.

Books for Further Reading


	Many quality publications, articles and books have been written about MEMS. We offer here a subjective selection of some of them, for those who wish to discover or perfect their knowledge of MEMS. Introductory Articles Joe McEntee. Start Making Microsensors, Physics World, December 1993, pp 33-37. J Bryzek, K Petersen, W McCulley. Micromachines on the March, IEEE Spectrum, 31 (5), May 1994, pp 20-31. A Heuberger. Silicon Microsystems, Microelectronic Engineering, 21, 1993, pp 445-458. Introductory Technical Articles IEE Colloquium on: Microengineering - the Future, held at the IEE, Savoy Place, London, 13 October 1993. Digest No: 1993/182. IEE Colloquium on: Microengineering in Instrumentation, held at the IEE, Savoy Place, London, 16 November 1993. Digest No: 1993/218. IEE Colloquium on: Medical Applications of Microengineering, held at the IEE, Savoy Place, London, 31 January 1996. Ref: 96/019 Technical Articles B. Fernandez, Joel A. Kubby. Large-stroke actuators have applications in adaptive optics and vision science, SPIE Newsroom, 2007 DV Morgan, K Board. An Introduction to Semiconductor Microtechnology, John Wiley & Sons, 1985. Notes from a two day short course on: Micromachining of Materials, held at the University of Southampton, 25 & 26 March 1992. University of Southampton Institute of Transducer Technology. Books for Further Reading The Art of Electronics, P Horowitz, W Hill., 2nd edn., 1989 Beyond Your Senses : The New World of Sensors, Hal Hellman 1997 Biosensors : A Practical Approach , AEG Cass (ed.)., 1990. Biosensors, EAH Hall., 1990 Chemical Microsensors and Applications, Stephanus Buettgenbach (Editor) 1998 Chemical Microsensors and Applications II, Stephanus Buettgenbach (Editor) 1999 Design, Characterization, and Packaging for Mems and Microelectronics, Bernard Courtois (Editor) 1999 Design, Test, Integration, and Packaging of MEMS and MOEMS, Bernard Courtois (Editor) Electromechanical Sensors and Actuators (Mechanical Engineering Series), Ilene J. Busch-Vishniac 1998 Electronics and Structures for MEMS, Neil W. Bergmann (Editor) 1999 Fundamentals of Microfabrication, Marc Madou 1997 Handbook of Microlithography, Micromachining, & Microfabrication, P. Rai-Choudhury (Editor) 1997 An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf 1999 The Investor's Guide to Nanotechnology and Micromachines, Glenn Fishbine Mechanical Microsensors (Microtechnology and MEMS), M. Elwenspoek; Remco J. Wiegerink MEMS: Powerhouse for Growth in Sensors, Actuators and Control Systems – a compilation of materials published under this name Methodology for the Modeling and Simulation of Microsystems, BF Romanowicz Microelectronic Structures & Mems for Optical Processing III (Volume 3226) M. Edward Motamedi (Editor) Micromachined Transducers Sourcebook, Gregory TA Kovacs Micromechanics and Mems : Classic and Seminal Papers to 1990, William Trimmer, 1997 Microsensors, RS Muller, RT Howe, SD Senturia, RL Smith, RM White (eds.), 1991. Microsensors, MEMS and Smart Devices, Julian W. Gardner - Just published in Dec '01 Microsensors : Principles and Applications, JW Gardner,1994 Microsystem Technology and Microrobotics, Ulrich Rembold (Contributor); Sergej Fatikow 1997 Optical MEMS: Worldwide Markets for a Strategic and Convergent Technology – a very expensive research study Newnes Electronics Engineer's Pocket Book, EA Parr (ed.)., 5th edn., 1986 Selected Papers on Optical MEMS, Victor M. Bright SemiConductor Wafer Bonding: Science and Technology. QY Tong 1998 Silicon Micromachining, M. Elwenspoek; HV Jansen 1999 Sensor Technology and Devices, L Ristic (ed.)., 1994.