Below you will find links to various reference material for PolyMUMPs. All of the documents below are free to download and distribute.

Please click the link(s) to reveal the documents and their download links.

MetalMUMPs Design Rules
This is the most important document to review and understand. Be sure to check regularly for updates to the Design Rules.

• MetalMUMPs Design Rules

MetalMUMPs CAD Files
Basic process setup files and design kits are available here for L-Edit. To receive design kits for other platforms or software packages, please contact the software company directly.

• MetalMUMPs process file for L-Edit
• MetalMUMPs technology file for Cadence
• MetalMUMPs display file for Cadence

To receive design kits for Coventorware, SoftMEMS, or Intellisense, please visit the following links:

• Link to Coventorware Design Kit web pages
• Link to Intellisense Design Kit web pages
• Link to SoftMEMS Design Kit contact information

MetalMUMPs Reference Material
Links to some additional information, not found in the Design Rules, can be accessed here such as Material Properties and Substrate Specifications.

• MetalMUMPs Material Properties
• MetalMUMPs Substrate Specifications
  

MetalMUMPs Presentations
Available here are PowerPoint presentations from our Short Courses for use as instructional aids or classroom tools.

• MetalMUMPs Process Flow and Design Rules