Reference Material

Below you will find links to various reference material for PolyMUMPs. All of the documents below are free to download and distribute.

Please click the link(s) to reveal the documents and their download links.

PolyMUMPs Run Data
The published run data for every PolyMUMPs run since #5 is available in one Excel file and can be downloaded by clicking the link.

PolyMUMPs Design Rules
This is the most important document to review and understand. Be sure to check regularly for updates to the Design Rules.
PolyMUMPs CAD Files
Basic process setup files and design kits are available here for L-Edit.

To receive design kits for Coventorware, SoftMEMS, or Intellisense, please visit the following links:



PolyMUMPs Reference Library
Links to the PolyMUMPs Technical FAQ, the Microsoft Research Notes, MUMPs Paper Bibliography, Device Release Instructions, and Substrate Specifications can be found here.
PolyMUMPs Presentations
Available here are PowerPoint presentations from our Short Courses for use as instructional aids or classroom tools.

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